Edwards QDP40 DRYSTAR Dry Semiconductor Laboratory Vacuum Pump 3-Phase For Sale
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Edwards QDP40 DRYSTAR Dry Semiconductor Laboratory Vacuum Pump 3-Phase :
$999.00
Edwards QDP40 DRYSTAR Dry Vacuum Pump
Edwards QDP-40 Dry Vacuum Pump is a four-stage, positive displacement rotary pump. These Dry Pumps are ideal for the corrosive enviroment of semiconductor processing. The applications range from light duty loadlock and sputtering to demanding processes including plasma etch, LPCVD, PECVD, and MOCVD.
General Specifications:
Power rating: 208 / 480 VAC, 3-Phase, 60 HzWarm-Up Time: 15 minMotor Rating: 2.2 kWInlet Connection: ISO40Outlet Connection: NW40Water CooledVacuum System Maximum Leak-Rate: 1 x 10-5 mbar ls-1 (1 x 10-3 Pa ls-1)Exhaust System Maximum Leak-Rate: 1 x 10-5 mbar ls-1 (1 x 10-3 Pa ls-1)Ambient Operating Temperature Range: 5Exterior:Nice, clean condition with minor cosmetic wear
Interior: Very nice, extremely clean condition with very little wear
Functionality: The pump itself has been tested to power on and is fully functional
*Pump will require 3-Phase power connection/power controller to be fully operational*
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